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The future is a world where everything is connected, and it is also a world with highly intelligent perception. Sensors are playing an increasingly important role in people's lives, and they have also helped people create more and more new values. In short, the Micro-Opto-Electro-Mechanical Systems (MOEMS: Micro-Opto-Electro-Mechanical Systems) integrates optics, microelectronics, and mechanical components into a micro system to realize sensor control functions. It is called a micro system because it is composed of components with a size between 1 and 100 microns (0.001 to 0.1 mm).
With the continuous improvement of the performance requirements of electronic products, Moore's Law has become a bottleneck. In the post-Moore era of More than Moore, the microsystems that were originally widely used, but with the help of their small size, light weight and low energy consumption, as well as the integration with the traditional silicon integrated circuit CMOS manufacturing process, continue to expand their application fields And reflects the increasing commercial value.